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doi: 10.3850/978-3-9815370-4-8_0269
Dictionary-Based Sparse Representation for Resolution Improvement in Laser Voltage Imaging of CMOS Integrated Circuits
T. Berkin Cilingiroglu1, Mahmoud Zangeneh1, Aydan Uyar1, W. Clem Karl1, Janusz Konrad1, Ajay Joshi1, Bennett B. Goldberg2 and M. Selim Unlu1
1Department of Electrical and Computer Engineering, Boston University, Boston, MA 02215, USA
2Department of Physics, Boston University, Boston, MA 02215, USA
ABSTRACT
The rapid decrease in the dimensions of integrated
circuits with a simultaneous increase in component density have
introduced resolution challenges for optical failure analysis techniques.
Although optical microscopy efforts continue to increase
resolution of optical systems through hardware modifications,
signal processing methods are essential to complement these
efforts to meet the resolution requirements for the nanoscale
integrated circuit technologies. In this work, we focus on laser
voltage imaging as the optical failure analysis technique and show
how an overcomplete dictionary-based sparse representation can
improve resolution and localization accuracy. We describe a
reconstruction approach based on this sparse representation and
validate its performance on simulated data. We achieve an 80%
reduction of the localization error.
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