Medical, healthcare, and life science applications require increasingly smarter and smaller devices and personalized medicine will lead to a significant increase in both complex lab solutions as well as a myriad of consumer-like disposable devices. Application examples such as multi-physics nano-bio transducers, cellular interfacing chips, multi-parameter biosensors, pharmaceutical assay chips, implantable and wearable wireless devices for patient monitoring and therapy will reveal complex heterogeneous microsystem designs and design methods, multi-level modeling approaches, co-development of design and process technology.