3D Interconnects and Integration Technologies for Biosensor Systems
Muhannad Bakir
Georgia Institute of Technology, US
ABSTRACT
We present a system for recording in vivo electromyography (EMG) signals from songbirds using flexible multi-electrode arrays (MEAs) featuring 3D integrated electronics. Electrodes with various pitches and topologies are evaluated by measuring EMG activity from the expiratory muscle of anesthetized songbirds. Air pressure data is also recorded simultaneously from the air sac of the songbird. Together, EMG recordings and air pressure measurements can be used to characterize how the nervous system controls breathing. Such technologies can in turn provide unique insights into motor control in a range of species, including humans. 3D IC integration enables the formfactors and interconnect densities needed in such applications. Focus will be given on the technology and microfabrication advances to enables such systems. We also discuss methods to use fine-grain 3D IC technology for electronic microplate technologies for CMOS biosensor systems with cell assays.
